Products
Semiconductor
The DF series furnace, manufactured by Semco Smartech Suzhou, is a high-performance horizontal tube furnace that combines semiconductor-grade precision with robust industrial process control. This batch-processing system features modular chambers with independent configurability, supporting operation in atmospheric, sub-atmospheric, and low-pressure environments. With a broad temperature range of 200-1300°C, it accommodates both gaseous and liquid precursors, delivering a scalable solution for large-scale clean heat treatment in industrial applications.
Our
Products.
Semco specializes in the designing and manufacturing of precision valves, panels and gas components used in many industries such as the semiconductor, photovoltaic and nuclear industries.
Expert in furnaces
As a leader in high-temperature process equipment, Smartech Suzhou designs and manufactures advanced LPCVD systems for semiconductor doping and deposition processes, ensuring optimal performance in diffusion, annealing, and oxidation applications. Our solutions address critical challenges in gas dynamics and thermal management for global semiconductor production.
Standard and
Custom made solutions.
Smartech Suzhou capability to provide both standard and custom made solutions enables our teams to give a high responsiveness in your request. Our large stock of valves enables us to still provide you with expertise and our dedicated teams are ready to assisy you in the designing of your components.
Check our online store to see our availabilities and contact us for any other product request!
About our Semiconductor
Modular, flexible & compact features:.
Modular, flexible & compact 1-4 independent process chamber reactors with wafer sizes ranging from 4 inches to 8 inches? can accommodate up to 400 wafers
Temperature
From 0°C to 250°C
Pipe Size
From 1/8′ to 1′
Pressure
From 0 to 200 bars
Custom product
Fully modular products on request
Norms
Our certifications and qualifications.
Smartech Suzhou continually trains its staff, modernizes its equipment and production tools in order to meet the level of requirements of its customers.
ISO 9001
Project in progress
COFREND 2
Qualification for the calculation of the sealing test
QMOS
Certified collaborators and equipment
ISO 7
Manufacturing in an ISO 7 cleanroom
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